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Observation of columnar microstructure in lattice-matched InAlN/GaN grown by plasma assisted molecular beam epitaxy

Journal Article · · APPLIED PHYSICS LETTERS
DOI:https://doi.org/10.1063/1.4725482· OSTI ID:1105182

Nominally lattice matched InAlN/GaN was grown by plasma-assisted molecular beam epitaxy, and the intrinsic microstructure was investigated via x-ray diffraction, transmission electron microscopy, and atom probe tomography. The InAlN showed a cellular structure, which was comprised of ~10 nm wide Al-rich cores and ~1 nm In-rich InAlN intercellular boundaries. Despite the strong laterally non-uniform In distribution, both vertical and lateral lattices are unperturbed by the cellular structure, as evidenced by strong thickness fringes in on-axis ω-2θ high resolution x-ray diffraction scans, coherence lengths derived from on-axis (0002) and off-axis (10{anti 1}2) ω-2θ high resolution x-ray diffraction scans, and a modified Williamson-Hall analysis for on-axis reflections.

Research Organization:
Energy Frontier Research Centers (EFRC); Center for Energy Efficient Materials (CEEM)
Sponsoring Organization:
USDOE SC Office of Basic Energy Sciences (SC-22)
DOE Contract Number:
SC0001009
OSTI ID:
1105182
Journal Information:
APPLIED PHYSICS LETTERS, Journal Name: APPLIED PHYSICS LETTERS Vol. 100
Country of Publication:
United States
Language:
English