Additives to silane for thin film silicon photovoltaic devices
Patent
·
OSTI ID:1093446
Chemical additives are used to increase the rate of deposition for the amorphous silicon film (.alpha.Si:H) and/or the microcrystalline silicon film (.mu.CSi:H). The electrical current is improved to generate solar grade films as photoconductive films used in the manufacturing of Thin Film based Photovoltaic (TFPV) devices.
- Research Organization:
- Air Products and Chemicals, Inc. (Allentown, PA)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0000580
- Assignee:
- Air Products and Chemicals, Inc. (Allentown, PA)
- Patent Number(s):
- 8,535,760
- Application Number:
- 12/872,806
- OSTI ID:
- 1093446
- Country of Publication:
- United States
- Language:
- English
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