Special issue on Current Trends in Optical and X-Ray Metrology of Advanced Materials for Nanoscale Devices III , E-MRS Spring 2012 Symposium W, held in Strasbourg, France, May 14 18, 2012
Conference
·
OSTI ID:1093108
- Tyndall National Institute, University College Cork, Ireland
- Université Européenne de Bretagne, France
- ORNL
- CNR/University of Parma, Italy
- Research Institute for Technical Physics and Materials, Hungary
- Research Organization:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- DE-AC05-00OR22725
- OSTI ID:
- 1093108
- Resource Relation:
- Conference: E-MRS, Strasbourg, DC, USA, 20120514, 20120518
- Country of Publication:
- United States
- Language:
- English
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