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Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material

Patent ·
OSTI ID:1092768
; ; ; ; ;
A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.
Research Organization:
SNL-A (Sandia National Laboratories, Albuquerque, NM (United States))
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
8,525,619
Application Number:
12/790,303
OSTI ID:
1092768
Country of Publication:
United States
Language:
English

References (8)

Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators journal April 2007
A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter conference January 2008
Process compensated micromechanical resonators conference January 2007
VHF and UHF mechanically coupled aluminum nitride MEMS filters conference May 2008
Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
  • Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
  • 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum https://doi.org/10.1109/FREQ.2007.4319108
conference May 2007
Limits of quality factor in bulk-mode micromechanical resonators conference January 2008
Frequency stability of high-overtone bulk-acoustic resonators
  • Bailey, D. S.; Driscoll, M. M.; Jelen, R. A.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 39, Issue 6 https://doi.org/10.1109/58.165564
journal November 1992
Microfabricated phononic crystal devices and applications journal November 2008

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