Ge Doped HfO (2) Thin Films Investigated by X-ray Absorption Spectroscopy
Journal Article
·
· J.Vac.Sci.Technol.A 28:693,2010
OSTI ID:1088763
- Research Organization:
- SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- AC02-76SF00515
- OSTI ID:
- 1088763
- Report Number(s):
- SLAC-REPRINT-2013-245
- Journal Information:
- J.Vac.Sci.Technol.A 28:693,2010, Journal Name: J.Vac.Sci.Technol.A 28:693,2010
- Country of Publication:
- United States
- Language:
- English
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