Band excitation method applicable to scanning probe microscopy

Jesse, Stephen; Kalinin, Sergei V

Band excitation method applicable to scanning probe microscopy

Patent · Tue May 28 00:00:00 EDT 2013

OSTI ID:1083943

Jesse, Stephen; Kalinin, Sergei V

Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation). An apparatus includes a band excitation signal generator; a probe coupled to the band excitation signal generator; a detector coupled to the probe; and a relevant dynamic parameter extractor component coupled to the detector, the relevant dynamic parameter extractor including a processor that performs a mathematical transform selected from the group consisting of an integral transform and a discrete transform.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC05-00OR22725

Assignee:: UT Battelle, LLC (Oak Ridge, TN)

Patent Number(s):: 8,448,502

Application Number:: 12/792,477

OSTI ID:: 1083943

Country of Publication:: United States

Language:: English

References (22)

Simultaneous elastic and electromechanical imaging by scanning probe microscopy: Theory and applications to ferroelectric and biological materials Shin, J.; Rodriguez, B. J.; Baddorf, A. P. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 5 https://doi.org/10.1116/1.2052714	journal	January 2005
Tip-surface forces, amplitude, and energy dissipation in amplitude-modulation (tapping mode) force microscopy Paulo, Álvaro San; García, Ricardo Physical Review B, Vol. 64, Issue 19 https://doi.org/10.1103/PhysRevB.64.193411	journal	October 2001
Magnetic dissipation force microscopy Grütter, P.; Liu, Y.; LeBlanc, P. Applied Physics Letters, Vol. 71, Issue 2 https://doi.org/10.1063/1.119519	journal	July 1997
Piezoresponse force microscopy for polarity imaging of GaN Rodriguez, B. J.; Gruverman, A.; Kingon, A. I. Applied Physics Letters, Vol. 80, Issue 22 https://doi.org/10.1063/1.1483117	journal	June 2002
Electromechanical imaging of biological systems with sub-10nm resolution Kalinin, Sergei V.; Rodriguez, B. J.; Jesse, S. Applied Physics Letters, Vol. 87, Issue 5 https://doi.org/10.1063/1.2006984	journal	August 2005
Relationship between phase shift and energy dissipation in tapping-mode scanning force microscopy Tamayo, Javier; Garcı́a, Ricardo Applied Physics Letters, Vol. 73, Issue 20 https://doi.org/10.1063/1.122632	journal	November 1998
Dynamic atomic force microscopy methods García, R. Surface Science Reports, Vol. 47, Issue 6-8 https://doi.org/10.1016/S0167-5729(02)00077-8	journal	September 2002
Domain pattern formation and kinetics on ferroelectric surfaces under thermal cycling using scanning force microscopy Likodimos, V.; Labardi, M.; Allegrini, M. Physical Review B, Vol. 66, Issue 2 https://doi.org/10.1103/PhysRevB.66.024104	journal	July 2002
A new atomic force microscope probe with force sensing integrated readout and active tip Onaran, A. G.; Balantekin, M.; Lee, W. Review of Scientific Instruments, Vol. 77, Issue 2 https://doi.org/10.1063/1.2166469	journal	February 2006
Atomic Force Acoustic Microscopy Rabe, Ute Applied Scanning Probe Methods II https://doi.org/10.1007/3-540-27453-7_2	book	January 2006
Local impedance imaging and spectroscopy of polycrystalline ZnO using contact atomic force microscopy Shao, Rui; Kalinin, Sergei V.; Bonnell, Dawn A. Applied Physics Letters, Vol. 82, Issue 12 https://doi.org/10.1063/1.1561168	journal	March 2003
Estimating the transfer function of the cantilever in atomic force microscopy: A system identification approach Stark, Martin; Guckenberger, Reinhard; Stemmer, Andreas Journal of Applied Physics, Vol. 98, Issue 11 https://doi.org/10.1063/1.2137887	journal	December 2005
Contact-Resonance Piezoresponse Force Microscope and Its Application to Domain Observation of Pb(Mg _1/3 Nb _2/3 )O ₃ –PbTiO ₃ Single Crystals Okino, Hirotake; Sakamoto, Junichi; Yamamoto, Takashi Japanese Journal of Applied Physics, Vol. 42, Issue Part 1, No. 9B https://doi.org/10.1143/JJAP.42.6209	journal	September 2003
Resonance frequency and Q factor mapping by ultrasonic atomic force microscopy Yamanaka, Kazushi; Maruyama, Yoshiki; Tsuji, Toshihiro Applied Physics Letters, Vol. 78, Issue 13 https://doi.org/10.1063/1.1357540	journal	March 2001
Silicon dopant imaging by dissipation force microscopy Stowe, T. D.; Kenny, T. W.; Thomson, D. J. Applied Physics Letters, Vol. 75, Issue 18 https://doi.org/10.1063/1.125149	journal	November 1999
Contact resonances in voltage-modulated force microscopy Harnagea, C.; Alexe, M.; Hesse, D. Applied Physics Letters, Vol. 83, Issue 2 https://doi.org/10.1063/1.1592307	journal	July 2003
Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope Sader, John Elie Journal of Applied Physics, Vol. 84, Issue 1 https://doi.org/10.1063/1.368002	journal	July 1998
Local poling of ferroelectric polymers by scanning force microscopy Güthner, P.; Dransfeld, K. Applied Physics Letters, Vol. 61, Issue 9 https://doi.org/10.1063/1.107693	journal	August 1992
Resonance enhancement in piezoresponse force microscopy: Mapping electromechanical activity, contact stiffness, and Q factor Jesse, Stephen; Mirman, Boris; Kalinin, Sergei V. Applied Physics Letters, Vol. 89, Issue 2 https://doi.org/10.1063/1.2221496	journal	July 2006
Design and performance of a high-resolution frictional force microscope with quantitative three-dimensional force sensitivity Dienwiebel, M.; de Kuyper, E.; Crama, L. Review of Scientific Instruments, Vol. 76, Issue 4 https://doi.org/10.1063/1.1889233	journal	April 2005
Dynamic behaviour in piezoresponse force microscopy Jesse, Stephen; Baddorf, Arthur P.; Kalinin, Sergei V. Nanotechnology, Vol. 17, Issue 6 https://doi.org/10.1088/0957-4484/17/6/014	journal	February 2006
Piezoelectricity of biopolymers Fukada, E. Biorheology, Vol. 32, Issue 6, p. 593-609 https://doi.org/10.1016/0006-355X(95)00039-C	journal	November 1995

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