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RAMAN THERMOMETRY AND THERMAL MODELING OF HIGHLY DOPED SILICON-ON-INSULATOR JOULE HEATED MEMS BRIDGES UNDER VARYING GAS PRESSURES.

Conference ·
OSTI ID:1073341
Abstract Not Provided
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1073341
Report Number(s):
SAND2012-3608C
Country of Publication:
United States
Language:
English

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