A Multi-Physics Finite Element Simulation to Model the Dynamics of an Electrostatic MEMS Valve.
Conference
·
OSTI ID:1073215
Abstract Not Provided
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1073215
- Report Number(s):
- SAND2012-5050C
- Country of Publication:
- United States
- Language:
- English
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