Hard x-ray Photoelectron Spectroscopy Study of As and Ga Out-diffusion in InGaAs/Al2O3 File Systems
N/A
- Research Organization:
- BROOKHAVEN NATIONAL LABORATORY (BNL)
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- AC02-98CH10886
- OSTI ID:
- 1069773
- Report Number(s):
- BNL--100345-2013-JA
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 6 Vol. 101; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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