Hierarchical Analysis of the Release Step in a Nanofabrication Process Using an Adhesion/Atomistic Friction Surface Interaction Model.
Journal Article
·
· Proposed for publication in Journal of Engineering Materials and Technology .
OSTI ID:1067781
Abstract Not Provided
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1067781
- Report Number(s):
- SAND2012-3739J
- Journal Information:
- Proposed for publication in Journal of Engineering Materials and Technology ., Journal Name: Proposed for publication in Journal of Engineering Materials and Technology .
- Country of Publication:
- United States
- Language:
- English
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