Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Three-dimensional metamaterials

Patent ·
OSTI ID:1055696
A fabrication method is capable of creating canonical metamaterial structures arrayed in a three-dimensional geometry. The method uses a membrane suspended over a cavity with predefined pattern as a directional evaporation mask. Metallic and/or dielectric material can be evaporated at high vacuum through the patterned membrane to deposit resonator structures on the interior walls of the cavity, thereby providing a unit cell of micron-scale dimension. The method can produce volumetric metamaterial structures comprising layers of such unit cells of resonator structures.
Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
8,197,887
Application Number:
12/512,082
OSTI ID:
1055696
Country of Publication:
United States
Language:
English

Similar Records

Full-wave simulation of a three-dimensional metamaterial prism
Journal Article · 2015 · Microwave and Optical Technology Letters · OSTI ID:1113284

Optimization of three-dimensional metamaterials for terahertz energy harvesting
Journal Article · 2021 · Journal of Vacuum Science and Technology A · OSTI ID:1980701

Modeling of the interaction of a volumetric metallic metamaterial structure with a relativistic electron beam
Dataset · 2018 · OSTI ID:1880525

Related Subjects