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Integration of block-copolymer with nano-imprint lithography : pushing the boundaries of emerging nano-patterning technology.

Technical Report ·
DOI:https://doi.org/10.2172/1055650· OSTI ID:1055650

Abstract Not Provided

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1055650
Report Number(s):
SAND2012-8414
Country of Publication:
United States
Language:
English