Integration of block-copolymer with nano-imprint lithography : pushing the boundaries of emerging nano-patterning technology.
- Sandia National Laboratories, Livermore, CA
Abstract Not Provided
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1055650
- Report Number(s):
- SAND2012-8414
- Country of Publication:
- United States
- Language:
- English
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