High-temperature langasite SAW oxygen sensor

Journal Article · Mon Aug 01 00:00:00 EDT 2011 · IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

DOI:https://doi.org/10.1109/TUFFC.2011.1979· OSTI ID:1053623

Peng Zheng,; Tao-Lun Chin,; Greve, David; Oppenheim, Irving; Malone, Vanessa; Limin Cao,

High-temperature langasite SAW oxygen sensors using sputtered ZnO as a resistive gas-sensing layer were fabricated and tested. Sensitivity to oxygen gas was observed between 500°C to 700°C, with a sensitivity peak at about 625°C, consistent with the theoretical predictions of the acoustoelectric effect.

• Research Organization: National Energy Technology Laboratory (NETL), Pittsburgh, PA, Morgantown, WV, and Albany, OR (United States)
• Sponsoring Organization: USDOE Office of Fossil Energy (FE)
• DOE Contract Number: FE0004000
• OSTI ID: 1053623
• Report Number(s): TPR-3401
• Journal Information: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Journal Name: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Journal Issue: 8 Vol. 58; ISSN 0885-3010
• Publisher: IEEE
• Country of Publication: United States
• Language: English

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