Nanofabrication of Doped, Complex Oxides
Complex oxides have many promising attributes, including wide band gaps for high temperature semiconductors, ion conducting electrolytes in fuel cells, ferroelectricity and ferromagnetism. Bulk and thin film oxides can be readily manufactured and tested however these physically hard and chemically inert materials cannot be nanofabricated by direct application of conventional methods. In order to study these materials at the nanoscale there must first be a simple and effective means to achieve the desired structures. Here we discuss the use of pulsed laser deposition at room temperature onto electron beam lithography defined templates of poly methyl methacrylate photoresist. Following a resist liftoff in organic solvents, a heat treatment was used to crystallize the nanostructures. The morphology of these structures was studied using scanning electron microscopy and atomic force microscopy. Crystallinity and composition as determined by x ray diffraction and photo-electron spectroscopy respectively is reported for thin film analogues of the nanostructured oxide. The oxide studied in this report is Nb doped SrTiO{sub 3}, which has been investigated for use as a high temperature thermoelectric material; however the approach used is not materials-dependent.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOE SC OFFICE OF SCIENCE (SC)
- DOE Contract Number:
- DE-AC02-98CH10886
- OSTI ID:
- 1037698
- Report Number(s):
- BNL-96206-2012-JA; R&D Project: NC-001; TRN: US201207%%513
- Journal Information:
- Journal of Vacuum Science and Technology B, Vol. 30, Issue 1; ISSN 1071-1023
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
77 NANOSCIENCE AND NANOTECHNOLOGY
ATOMIC FORCE MICROSCOPY
DEPOSITION
ELECTROLYTES
ELECTRON BEAMS
FERROMAGNETISM
FUEL CELLS
HEAT TREATMENTS
LASERS
METHACRYLIC ACID ESTERS
MORPHOLOGY
NANOSTRUCTURES
ORGANIC SOLVENTS
OXIDES
SCANNING ELECTRON MICROSCOPY
SPECTROSCOPY
THERMOELECTRIC MATERIALS
THIN FILMS
X-RAY DIFFRACTION