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Title: Nanofabrication of Doped, Complex Oxides

Abstract

Complex oxides have many promising attributes, including wide band gaps for high temperature semiconductors, ion conducting electrolytes in fuel cells, ferroelectricity and ferromagnetism. Bulk and thin film oxides can be readily manufactured and tested however these physically hard and chemically inert materials cannot be nanofabricated by direct application of conventional methods. In order to study these materials at the nanoscale there must first be a simple and effective means to achieve the desired structures. Here we discuss the use of pulsed laser deposition at room temperature onto electron beam lithography defined templates of poly methyl methacrylate photoresist. Following a resist liftoff in organic solvents, a heat treatment was used to crystallize the nanostructures. The morphology of these structures was studied using scanning electron microscopy and atomic force microscopy. Crystallinity and composition as determined by x ray diffraction and photo-electron spectroscopy respectively is reported for thin film analogues of the nanostructured oxide. The oxide studied in this report is Nb doped SrTiO{sub 3}, which has been investigated for use as a high temperature thermoelectric material; however the approach used is not materials-dependent.

Authors:
; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE SC OFFICE OF SCIENCE (SC)
OSTI Identifier:
1037698
Report Number(s):
BNL-96206-2012-JA
Journal ID: ISSN 1071-1023; R&D Project: NC-001; TRN: US201207%%513
DOE Contract Number:  
DE-AC02-98CH10886
Resource Type:
Journal Article
Journal Name:
Journal of Vacuum Science and Technology B
Additional Journal Information:
Journal Volume: 30; Journal Issue: 1; Journal ID: ISSN 1071-1023
Country of Publication:
United States
Language:
English
Subject:
30 DIRECT ENERGY CONVERSION; 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTROLYTES; ELECTRON BEAMS; FERROMAGNETISM; FUEL CELLS; HEAT TREATMENTS; LASERS; METHACRYLIC ACID ESTERS; MORPHOLOGY; NANOSTRUCTURES; ORGANIC SOLVENTS; OXIDES; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; THERMOELECTRIC MATERIALS; THIN FILMS; X-RAY DIFFRACTION

Citation Formats

Stein, A, Waller, G H, and Abiade, J T. Nanofabrication of Doped, Complex Oxides. United States: N. p., 2012. Web.
Stein, A, Waller, G H, & Abiade, J T. Nanofabrication of Doped, Complex Oxides. United States.
Stein, A, Waller, G H, and Abiade, J T. Sun . "Nanofabrication of Doped, Complex Oxides". United States.
@article{osti_1037698,
title = {Nanofabrication of Doped, Complex Oxides},
author = {Stein, A and Waller, G H and Abiade, J T},
abstractNote = {Complex oxides have many promising attributes, including wide band gaps for high temperature semiconductors, ion conducting electrolytes in fuel cells, ferroelectricity and ferromagnetism. Bulk and thin film oxides can be readily manufactured and tested however these physically hard and chemically inert materials cannot be nanofabricated by direct application of conventional methods. In order to study these materials at the nanoscale there must first be a simple and effective means to achieve the desired structures. Here we discuss the use of pulsed laser deposition at room temperature onto electron beam lithography defined templates of poly methyl methacrylate photoresist. Following a resist liftoff in organic solvents, a heat treatment was used to crystallize the nanostructures. The morphology of these structures was studied using scanning electron microscopy and atomic force microscopy. Crystallinity and composition as determined by x ray diffraction and photo-electron spectroscopy respectively is reported for thin film analogues of the nanostructured oxide. The oxide studied in this report is Nb doped SrTiO{sub 3}, which has been investigated for use as a high temperature thermoelectric material; however the approach used is not materials-dependent.},
doi = {},
journal = {Journal of Vacuum Science and Technology B},
issn = {1071-1023},
number = 1,
volume = 30,
place = {United States},
year = {2012},
month = {1}
}