Micro-Gas-Analyzer MEMS Active Pressure Valves Testing and Design
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Micro-Gas-Analyzers have many applications in detecting chemical compounds present in the air. MEMS valves are used to perform sampling of gasses, as they enable control of fluid flow at the micro level. Current generation electrostatically actuated MEMS valves were tested to determine their ability to hold off a given gauge pressure with an applied voltage. Current valve designs were able to hold off 98 psi with only 82 V applied to the valves. The valves were determined to be 1.83 times more efficient than older valve designs, due to increasing the electrostatic area of the valve and trapping oxide between polysilicon layers. Newer valve designs were also proposed and modeled using ANSYS multiphysics, which should be able to hold off 100 psi with only 29 V needed. This performance would be 2.82 times more efficient than current designs, or 5.17 times more efficient than older valve designs. This will be accomplished by further increasing the valve radius and decreasing the gap between the valve boss and electrode.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1035997
- Report Number(s):
- SAND--2012-0124
- Country of Publication:
- United States
- Language:
- English
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