Chip scale mechanical spectrum analyzers based on high quality factor overmoded bulk acouslic wave resonators
Program Document
·
OSTI ID:1035843
The goal of this project was to develop high frequency quality factor (fQ) product acoustic resonators matched to a standard RF impedance of 50 {Omega} using overmoded bulk acoustic wave (BAW) resonators. These resonators are intended to serve as filters in a chip scale mechanical RF spectrum analyzer. Under this program different BAW resonator designs and materials were studied theoretically and experimentally. The effort resulted in a 3 GHz, 50 {Omega}, sapphire overmoded BAW with a fQ product of 8 x 10{sup 13}, among the highest values ever reported for an acoustic resonator.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1035843
- Report Number(s):
- SAND2012-1705P
- Country of Publication:
- United States
- Language:
- English
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