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Title: Sandia National Laboratories : Microsystems Engineering Sciences and Applications (MESA) : MEMS technologies.

Conference ·
OSTI ID:1020428

No abstract prepared.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1020428
Report Number(s):
SAND2010-4005C; TRN: US201116%%476
Resource Relation:
Conference: Proposed for presentation at the Sandia MEMS Designing for the SUMMiT V Process Using AutoCAD held June 22-23, 2010 in Albuquerque, NM.
Country of Publication:
United States
Language:
English