Sandia National Laboratories : Microsystems Engineering Sciences and Applications (MESA) : MEMS technologies.
Conference
·
OSTI ID:1020428
No abstract prepared.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1020428
- Report Number(s):
- SAND2010-4005C; TRN: US201116%%476
- Resource Relation:
- Conference: Proposed for presentation at the Sandia MEMS Designing for the SUMMiT V Process Using AutoCAD held June 22-23, 2010 in Albuquerque, NM.
- Country of Publication:
- United States
- Language:
- English
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