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U.S. Department of Energy
Office of Scientific and Technical Information
 

Sandia National Laboratories : Microsystems Engineering Sciences and Applications (MESA) : MEMS technologies.

Conference ·
OSTI ID:1020428

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1020428
Report Number(s):
SAND2010-4005C
Country of Publication:
United States
Language:
English

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Related Subjects

42 ENGINEERING
ACTUATORS
DIMENSIONS
ENGINEERING
FUNCTIONALS
MICROELECTRONICS
SANDIA NATIONAL LABORATORIES
SENSORS
TRANSDUCERS