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Title: Room temperature photoluminescence of Ge nanostructures by high energy implantation of Ge into a buried oxide of silicon. DOE Phase 1 SBIR final report

Technical Report ·
OSTI ID:10200972
 [1];  [2]
  1. IBIS Technology Corp., Danvers, MA (United States)
  2. Brown Univ., Providence, RI (United States). Div. of Engineering

Research Organization:
IBIS Technology Corp., Danvers, MA (United States); Epion Corp., Bedford, MA (United States); Brown Univ., Providence, RI (United States). Div. of Engineering
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
FG02-93ER81611
OSTI ID:
10200972
Type / Phase:
SBIR
Report Number(s):
DOE/ER/81611-1; ON: TI96020427; BR: KM0000000
Resource Relation:
Other Information: PBD: 12 May 1994
Country of Publication:
United States
Language:
English