Demonstration of ultraviolet lasing with a low energy electron beam

Conference · Tue Aug 10 04:00:00 EDT 1993

OSTI ID:10185585

O`Shea, P G; Bender, S C; Byrd, D A ^[1]

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1. and others

We report on the design details of the first ultraviolet (UV) free-electron laser (FEL) oscillator driven by low-energy electrons from a radio-frequency linear accelerator. In our experiment we used a high-current, high brightness electon beam in combination with a wiggler of novel design to produce an FEL that lased at wavelengths from 369--380 nm using 45.9--45.2 MeV electrons. In addition we performed a proof-of principle experiment that demonstrated the first ever photolithography on a photoresist-coated silicon wafer using an FEL light source.

• Research Organization: Los Alamos National Lab., NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• OSTI ID: 10185585
• Report Number(s): LA-UR--93-3039; CONF-930855--4; ON: DE93040192
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601
42 ENGINEERING
426000
426002
BEAM EMITTANCE
COMPONENTS
ELECTRON DEVICES AND CIRCUITS
DESIGN
FABRICATION
FREE ELECTRON LASERS
INTEGRATED CIRCUITS
LASER RADIATION
LASERS AND MASERS
LINEAR ACCELERATORS
PERFORMANCE
PREPARATION AND MANUFACTURE
SILICON
ULTRAVIOLET RADIATION
WIGGLER MAGNETS