Acoustic, fiber optic, and silicon microelectronic microsensors research and development activities at Sandia National Laboratories
Sandia National Laboratories, an 8500+ person, multiprogram research and development facility operated for the US Department of Energy, has over 400 research, development and applications scientists and engineers working on sensor technologies. Sandia`s 20 person Microsensors Research and Development Department has invented, developed and fielded sensor systems based on acoustic, fiber optic, and silicon microelectronic technologies. These sensors have been used for diverse applications inducting the monitoring of cleaning chemical concentrations in industrial process effluent streams, detection of explosive gas concentrations in aging industrial equipment, real-time measurements of fluid viscosity in equipment lubricants, and monitoring of contaminant concentration levels in ultrapure process gases. Representative sensor technologies available for technology transfer will be described including bulk acoustic wave resonators, surface acoustic wave devices, fiber optic micromirror sensors, and silicon microelectronic sensors.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10184545
- Report Number(s):
- SAND--93-1564C; CONF-9310146--1; ON: DE93019075
- Country of Publication:
- United States
- Language:
- English
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