The linear dynamics of a microsensor accelerometer modeled as a cantilever beam with an end mass
Two classes of accelerometers are being developed using silicon microsensor technology. One class of accelerometers will be used to measure accelerations on the order of 10{sup {minus}6}g range. A dynamic model of these devices is derived in order to aid in their design and characterization. Both types of accelerometers axe modeled as a flexible cantilever beam that is fixed at one end and has a mass attached to the free end. Linear motion about a (straight) horizontal equilibrium shape is considered. The natural frequencies and mode shapes of the model are calculated in terms of the system geometry and material properties. With these results, the continuum model is discretized into a set of modal equations. The responses of the discrete model subject to an impulsive force, a step force, and a single-frequency harmonic external excitation are determined. A comparison between the characteristics of a lumped mass model and a one-degree-of-freedom modal model is presented. Finally, numerical values are given for an example case of a beam without the end mass.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 10183700
- Report Number(s):
- UCRL-ID-118367; ON: DE94019108; TRN: 94:008442
- Resource Relation:
- Other Information: PBD: 4 Aug 1994
- Country of Publication:
- United States
- Language:
- English
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