Development of solid state moisture sensors for semiconductor fabrication applications
We describe the design and fabrication of two types of solid state moisture sensors, and discuss the results of an evaluation of the sensors for the detection of trace levels of moisture in semiconductor process gases. The first sensor is based on surface acoustic wave (SAW) technology. A moisture sensitive layer is deposited onto a SAW device, and the amount of moisture adsorbed on the layer produces a proportional shift in the operating frequency of the device. Sensors based on this concept have excellent detection limits for moisture in inert gas (100 ppb) and corrosive gas (150 ppb in HCl). The second sensor is a simple capacitor structure that uses porous silicon as a moisture-sensitive dielectric material. The detection limits of these sensors for moisture in inert gas are about 700 ppb prior to HCl exposure, and about 7 ppm following HCl exposure.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10169896
- Report Number(s):
- SAND--94-1533C; CONF-9410161--1; ON: DE94015771; BR: GB0103012
- Country of Publication:
- United States
- Language:
- English
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