Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Low-speckle holographic beam shaping of high-coherence EUV sources

Conference ·
OSTI ID:1016570
This paper describes a method to arbitrarily shape and homogenize high-coherence extreme ultraviolet sources using time-varying holographic optical elements and a scanning subsystem to mitigate speckle. In systems with integration times longer than 100 ms, a speckle contrast below 1% can be achieved.
Research Organization:
Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
Sponsoring Organization:
Materials Sciences Division
DOE Contract Number:
AC02-05CH11231
OSTI ID:
1016570
Report Number(s):
LBNL-4572E
Country of Publication:
United States
Language:
English

Similar Records

Different measures of speckle and coherence at the output of a multimode optical fiber
Journal Article · Wed Dec 05 19:00:00 EST 2018 · Journal of the Optical Society of America. A, Optics, Image Science, and Vision · OSTI ID:1571610

Speckle pattern of the images of objects exposed to monochromatic coherent terahertz radiation
Journal Article · Sun May 31 00:00:00 EDT 2009 · Quantum Electronics (Woodbury, N.Y.) · OSTI ID:21467134

Self-organized coherent bursts of stimulated Raman scattering and speckle interaction in multi-speckled laser beams
Journal Article · Mon Jan 14 23:00:00 EST 2013 · Physics of Plasmas · OSTI ID:22113363