Thermal properties of silicon nitride beams below one Kelvin.

Conference · Wed Jun 01 04:00:00 EDT 2011 · IEEE Trans. Appl. Supercond.

DOI:https://doi.org/10.1109/TASC.2010.2089407· OSTI ID:1016467

Wang, G; Yefremenko, V; Novosad, V; Datesman, A; Pearson, J; Divan, R; Chang, C L; Bleem, L; Crites, A T; Mehl, J; Natoli, T; McMahon, J; Sayre, J; Ruhl, J; Meyer, S S; Carlstrom, J E ^[1]

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1. Center for Nanoscale Materials

We have investigated thermal properties of 1 {micro}m thick silicon nitride beams of different lateral dimensions. We measured the thermal conductance by simultaneously employing a TES both as a heater and as a sensor. Based upon these measurements, we calculate the thermal conductivity of the beams. We utilize a boundary limited phonon transport model and assume a temperature independent phonon mean free path. We find that the thermal conductivity is determined by the fraction of diffusive reflection at surface. The following results are obtained from 0.30 K to 0.55 K: the volume heat capacity is 0.082T+0.502T{sup 3} J/m{sup 3}-K . The width dependent phonon mean free path is 6.58 {micro}m, 9.80 {micro}m and 11.55 {micro}m for 10 {micro}m, 20 {micro}m and 30 {micro}m beams respectively at a 29% surface diffusive reflection.

• Research Organization: Argonne National Laboratory (ANL)
• Sponsoring Organization: SC
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 1016467
• Report Number(s): ANL/MSD/CP-69488
• Conference Information: Journal Name: IEEE Trans. Appl. Supercond. Journal Issue: 3 ; Jun. 2011 Journal Volume: 21
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS
DIMENSIONS
HEATERS
MEAN FREE PATH
PHONONS
REFLECTION
SILICON NITRIDES
SPECIFIC HEAT
SUPERCONDUCTIVITY
THERMAL CONDUCTIVITY
THERMODYNAMIC PROPERTIES
TRANSPORT