Ion beam generation and propagation for plasma processing applications
Intense ion beams are being employed at Los Alamos to deposit thin films. Extraction geometry magnetically-insulated ion diodes (MID) are used to generate ion beams with currents up to 35 kA at 450 kV in a one-half microsecond long pulse. Multidimensional electromagnetic particle-in-cell (PIC) simulations have been performed to model the generation, extraction, and focusing of proton beams in realistic geometries. A ballistically focused MID has been studied to achieve the high deposition rates needed to form ablation plumes that preserve stoichiometric ratios. A high density waist with a diameter less than 8 cm is calculated near the geometrical focus. Extraction efficiency, beam divergence downstream of the aperture, and neutralization issues have been studied with the simulations.
- Research Organization:
- Los Alamos National Lab., NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 10163090
- Report Number(s):
- LA-UR--94-2176; CONF-940634--8; ON: DE94014428
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
665300
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ENERGY BEAM DEPOSITION
ENERGY BEAM DEPOSITION FILMS
INTERACTIONS BETWEEN BEAMS AND CONDENSED MATTER
ION BEAMS
PARTICLE BEAM PRODUCTION AND HANDLING
PLASMA SIMULATION
PRODUCTION
TARGETS
THIN FILMS