Implantation of carbon in GaAs
- Univ. of California, Berkeley, CA (United States)
Carbon implanted into GaAs and thermally annealed typically exhibits very low (<3%) electrical activity. It has been demonstrated that the electrical activity of C can be significantly enhanced by co-implantation with Ga. Improved activation may result from either additional damage of the crystal lattice or from stoichiometric changes, forcing the C atoms onto As sites. To determine the relative importance of each of these effects, I have undertaken a systematic study of carbon activation in GaAs. A range of co-implants have been used: group III (B, Ga), group V (N, P, As) and noble gases (Ar, Kr). The damage introduced to the substrate will depend on the mass of the ion implanted. The group III and group V co-implants will affect the crystal stoichiometry. The results indicate that both lattice damage and crystal stoichiometry are important for high electrical activity of C. Increasing the damage will increase the activation due to the increased number of As vacancies but maximum activation can be obtained only by a co-implant which not only damages the lattice but also forces the C to occupy an As site.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 10159456
- Report Number(s):
- LBL--32253; ON: DE92016921
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
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665300
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
CARBON
CHANNELING
CRYSTAL DEFECTS
CRYSTAL LATTICES
GALLIUM ARSENIDES
INTERACTIONS BETWEEN BEAMS AND CONDENSED MATTER
ION IMPLANTATION
PHYSICAL RADIATION EFFECTS
PRECIPITATION
RADIATION EFFECTS