Measurement of scanning electron microscope resolution

Conference · Wed Jun 01 04:00:00 EDT 1994

OSTI ID:10154579

Bentley, J; Kenik, E A ^[1]; Evans, N D ^[2]

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1. Oak Ridge National Lab., TN (United States)
2. Oak Ridge Inst. for Science and Education, TN (United States)

Resolution is traditionally determined with specimens such as gold islands on bulk C supports; however this is subjective. By substituting a thin C support for the traditional bulk C, while retaining the gold islands, the essential features of the traditional SEM resolution test specimen remain unchanged, but an independent and reliable measurement of particle sizes and spacings becomes possible using TEM. A test specimen consisting of latex spheres supported on a thin, holey C film, obliquely shadowed with gold, can be used for resolution tests at the sub-2nm level; the latex sphere arrangement, shadows in the gold coverage, and holes in the C film enable the same area to be found rapidly in TEM and SEM instruments. The area used for assessing SEM performance is also imaged by TEM, either before or after the SEM work; advantages of each sequence are discussed.

• Research Organization: Oak Ridge National Lab., TN (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 10154579
• Report Number(s): CONF-940753--6; ON: DE94012661
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101
440800
47 OTHER INSTRUMENTATION
ACTIVATION, NUCLEAR REACTION, RADIOMETRIC, AND RADIOCHEMICAL PROCEDURES
ELECTRON MICROSCOPES
MEASURING METHODS
MISCELLANEOUS INSTRUMENTATION
RESOLUTION
SCANNING ELECTRON MICROSCOPY