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Title: Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy

Patent ·
OSTI ID:1014683

An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.-

Research Organization:
Hysitron, Inc. (Minneapolis, MN)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG02-04ER83979
Assignee:
Hysitron, Inc. (Minneapolis, MN)
Patent Number(s):
7,798,011
Application Number:
US Patent Application 11/672,489
OSTI ID:
1014683
Country of Publication:
United States
Language:
English