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U.S. Department of Energy
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Ion beam assisted deposition of tribological coatings. Quarterly summary

Technical Report ·
OSTI ID:10139136
TiN coatings 5 micrometers thick were deposited in UHV IBAD chamber onto M50 and Si substrates over a wide range of R (Ar-ion-to-Ti-atom ratio) values. Sputtering reduced the actual thickness at high R values, with two out of every three deposited Ti atoms being removed at R = 0.7. Because of charge exchange neutralization, it was possible to obtain coatings in the UHV IBAD system with properties equivalent to those deposited in the high vacuum IBAD system by using a higher apparent R value. Unless the extent of the charge exchange neutralization is known, it will not be possible to duplicate coating properties. Adhesion of the thick TiN coating deposited at R - 0.5 was equivalent to a magnetron sputtered TiN coating. Thick Cr{sub 2}O{sub 3} coatings were deposited onto M50 and Si substrates and wear testing was initiated. At high R values, sputtering prevented chemisorption of oxygen at surface. The wear process eliminated most of the surface topography.
Research Organization:
Naval Research Lab., Washington, DC (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
AI02-88CE90024
OSTI ID:
10139136
Report Number(s):
DOE/CE/90024--5; ON: DE93011524
Country of Publication:
United States
Language:
English