Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range
A modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays [Proc. SPIE 7077-7 (2007), Opt. Eng. 47, 073602 (2008)] has been proven to be an effective MTF calibration method for a number of interferometric microscopes and a scatterometer [Nucl. Instr. and Meth. A616, 172 (2010)]. Here we report on a further expansion of the application range of the method. We describe the MTF calibration of a 6 inch phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters.
- Research Organization:
- Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (US)
- Sponsoring Organization:
- Advanced Light Source Division; Engineering Division; Materials Sciences Division
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 1012479
- Report Number(s):
- LBNL-4527E
- Journal Information:
- Optical Engineering, Journal Name: Optical Engineering; ISSN 0091-3286; ISSN OPEGAR
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
47 OTHER INSTRUMENTATION
ALGORITHMS
ASYMMETRY
CALIBRATION
DATA PROCESSING
ELECTRON MICROSCOPES
MICROSCOPES
MODULATION
SEM
SPECTRAL DENSITY
TEM
TRANSFER FUNCTIONS
WAVELENGTHS
binary pseudo-random
calibration
interferometer
modulation transfer function
power spectral density
scanning electron microscope
surface metrology
surface profilometer
transmission electron microscope