Rapid localization of IC open conductors using Charge-Induced Voltage Alteration (CIVA)
Charged-Induced Voltage Alternation (CIVA) is a new scanning electron microscopy technique developed to localize open conductors on both passivated and ICs. CIVA overcomes the limitations usually encountered in localizing open conductors. CIVA images are produced by monitoring the voltage fluctuations of a constant current power supply as an electron beam is scanned over the IC surface. Contrast variations in the CIVA images are generated only from the electrically open portion of a conductor. Because of this high selectivity, CIVA facilitates localization of open interconnections on an entire IC in a single, unprocessed image. The equipment needed to implement CIVA and examples of applying the technique to several failed CMOS ICs are described. Possible radiation effects and methods to minimize them are also discussed. 13 refs.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10111904
- Report Number(s):
- SAND-91-1850C; CONF-920327-1; ON: DE92004481
- Resource Relation:
- Conference: Institute of Electrical and Electronics Engineers (IEEE) international reliability physics symposium,San Diego, CA (United States),30 Mar - 2 Apr 1992; Other Information: PBD: [1991]
- Country of Publication:
- United States
- Language:
- English
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