Molecular beam mass spectrometry studies of the chemical vapor deposition of diamond
Conference
·
OSTI ID:10107495
- Sandia National Labs., Livermore, CA (United States)
- Sandia National Labs., Albuquerque, NM (United States)
- Colorado State Univ., Fort Collins, CO (United States). Dept. of Chemical Engineering
We have developed a novel molecular beam mass spectrometry technique that can quantitatively analyze the gas-phase composition in a CVD reactor. The technique simultaneously monitors a wide variety of radical and stable species, and their concentrations can be determined with sensitivities approaching 1 ppM. Measurements performed in a diamond deposition system have given us keen insights into the important phenomena that affect the growth environment. This paper first discusses the primary gas sampling design issues. In the second part, the details of the experimental results and their implications will be described.
- Research Organization:
- Sandia National Labs., Livermore, CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10107495
- Report Number(s):
- SAND--93-2678C; CONF-9311142--1; ON: DE94003802; BR: GB0103012
- Country of Publication:
- United States
- Language:
- English
Similar Records
Application of molecular beam mass spectrometry to chemical vapor deposition studies
MBMS studies of gas-phase kinetics in diamond chemical vapor deposition
The use of electrophoretically deposited diamond powder coatings as a precursor for chemically vapor deposited diamond
Journal Article
·
Tue Sep 01 00:00:00 EDT 1992
· Review of Scientific Instruments; (United States)
·
OSTI ID:7161832
MBMS studies of gas-phase kinetics in diamond chemical vapor deposition
Conference
·
Tue Feb 28 23:00:00 EST 1995
·
OSTI ID:110846
The use of electrophoretically deposited diamond powder coatings as a precursor for chemically vapor deposited diamond
Conference
·
Mon Dec 30 23:00:00 EST 1991
·
OSTI ID:10106965