An improved Reynolds-equation model for gas damping of microbeam motion.
An improved gas-damping model for the out-of-plane motion of a near-substrate microbeam is developed based on the Reynolds equation (RE). A boundary condition for the RE is developed that relates the pressure at the beam edge to the beam motion. The coefficients in this boundary condition are determined from Navier-Stokes slip-jump (NSSJ) simulations for small slip lengths (relative to the gap height) and from direct simulation Monte Carlo (DSMC) molecular gas dynamics simulations for larger slip lengths. This boundary condition significantly improves the accuracy of the RE when the microbeam width is only slightly greater than the gap height between the microbeam and the substrate. The improved RE model is applied to microbeams fabricated using the SUMMiT V process.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1005054
- Report Number(s):
- SAND2003-3231J
- Journal Information:
- Proposed for publication in Journal of MicroElectroMechanical Systems., Journal Name: Proposed for publication in Journal of MicroElectroMechanical Systems. Journal Issue: 4 Vol. 13; ISSN 1057-7157; ISSN JMIYET
- Country of Publication:
- United States
- Language:
- English
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