Silicon Oxynitride Thin Film Barriers for PV Packaging (Poster)
Dielectric, adhesion-promoting, moisture barriers comprised of silicon oxynitride thin film materials (SiOxNy with various material stoichiometric compositions x,y) were applied to: 1) bare and pre-coated soda-lime silicate glass (coated with transparent conductive oxide SnO2:F and/or aluminum), and polymer substrates (polyethylene terephthalate, PET, or polyethylene napthalate, PEN); plus 2) pre- deposited photovoltaic (PV) cells and mini-modules consisting of amorphous silicon (a-Si) and copper indium gallium diselenide (CIGS) thin-film PV technologies. We used plasma enhanced chemical vapor deposition (PECVD) process with dilute silane, nitrogen, and nitrous oxide/oxygen gas mixtures in a low-power (< or = 10 milliW per cm2) RF discharge at ~ 0.2 Torr pressure, and low substrate temperatures < or = 100(degrees)C, over deposition areas ~ 1000 cm2. Barrier properties of the resulting PV cells and coated-glass packaging structures were studied with subsequent stressing in damp-heat exposure at 85(degrees)C/85% RH. Preliminary results on PV cells and coated glass indicate the palpable benefits of the barriers in mitigating moisture intrusion and degradation of the underlying structures using SiOxNy coatings with thicknesses in the range of 100-200 nm.
- Research Organization:
- National Renewable Energy Lab. (NREL), Golden, CO (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-08GO28308
- OSTI ID:
- 1000568
- Report Number(s):
- NREL/PO-5200-40682; TRN: US201101%%378
- Resource Relation:
- Conference: Prepared for the CU-NREL Research Symposium, 3 October 2006, Boulder, Colorado; Related Information: NREL (National Renewable Energy Laboratory); 01/19/07: Electronic files archived by publications services. Contact author for additional information.
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
ALUMINIUM
CHEMICAL VAPOR DEPOSITION
COATINGS
COPPER
DEPOSITION
GALLIUM
GLASS
INDIUM
MIXTURES
MOISTURE
NITROGEN
OXIDES
PACKAGING
PLASMA
POLYETHYLENES
POLYMERS
SILICATES
SILICON
SUBSTRATES
THIN FILMS
THIN FILM
SILICON OXYNITRIDE
PV CELLS
MOISTURE BARRIERS
Solar Energy - Photovoltaics