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Title: Systems and methods for the combinatorial synthesis of novel materials

Patent ·
OSTI ID:872933

Methods and apparatus for the preparation of a substrate having an array of diverse materials in predefined regions thereon. A substrate having an array of diverse materials thereon is generally prepared by depositing components of target materials to predefined regions on the substrate, and, in some embodiments, simultaneously reacting the components to form at least two resulting materials. In particular, the present invention provides novel masking systems and methods for applying components of target materials onto a substrate in a combinatorial fashion, thus creating arrays of resulting materials that differ slightly in composition, stoichiometry, and/or thickness. Using the novel masking systems of the present invention, components can be delivered to each site in a uniform distribution, or in a gradient of stoichiometries, thicknesses, compositions, etc. Resulting materials which can be prepared using the methods and apparatus of the present invention include, for example, covalent network solids, ionic solids and molecular solids. Once prepared, these resulting materials can be screened sequentially, or in parallel, for useful properties including, for example, electrical, thermal, mechanical, morphological, optical, magnetic, chemical and other properties.

Research Organization:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
DOE Contract Number:
AC03-76SF00098
Assignee:
Symyx Technologies, Inc. (Santa Clara, CA)
Patent Number(s):
US 6045671
OSTI ID:
872933
Country of Publication:
United States
Language:
English

References (5)

Electroluminescence in ZnS: Mn x : Cu y rf–Sputtered Films journal January 1974
Calculation of composition of dilute cosputtered multicomponent films journal November 1973
Compositional Determination of rf Co-Sputtered Multicomponent Systems journal January 1971
The effect of grain size on the superconducting transition temperature of the transition metals journal October 1969
Radio‐Frequency‐Sputtered Films of β‐Tungsten Structure Compounds journal November 1970