Micro-machined resonator oscillator

Patent · Sat Jan 01 00:00:00 EST 1994

OSTI ID:869452

Koehler, Dale R ^[1]; Sniegowski, Jeffry J ^[1]; Bivens, Hugh M ^[1]; Wessendorf, Kurt O ^[1]

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1. Albuquerque, NM

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

• Research Organization: AT&T
• DOE Contract Number: AC04-76DP00789
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 5339051
• OSTI ID: 869452
• Country of Publication: United States
• Language: English

Related Subjects

micro-machined
resonator
oscillator
micro-miniature
resonator-oscillator
disclosed
due
miniaturization
oscillation
frequencies
mhz
utilized
thickness-mode
quartz
housed
silicon
package
operated
telemetered
sensor
beacon
digital
self-powered
remote
parameter
measuring-transmitter
fm-band
design
trapped
energy
principles
temperature
dependence
methodology
crystal
orientation
control
operation
20-100
range
volume
batch-processing
manufacturing
assembly
wafer
level
unique
features
squeeze-film
damping
robust
vibration
shock
performance
capacitive
coupling
diaphragms
allowing
excitation
exterior
circuit
integration
extremely
square
dimensioning
family
beacons
widespread
applications
bio-medical
sensors
vehicle
status
monitors
high-volume
animal
identification
health
allows
measurement
temperatures
chemicals
acceleration
pressure
microphone
clock
realization
available
quartz resonator
resonator assembly
temperature dependence
micro-machined resonator
crystal orientation
design features
hz range
allows measurement
medical sensor
capacitive coupling
/331/310/324/343/455/