Deposition and properties of novel nitride superlattice coatings
We have carried out detailed studies of the processing, structure, and properties of certain polycrystalline superlattice coatings, including TiN/NbN, TiN/VN, TiN/Ni, and TiN/NiCr, which were produced using an opposed, dual-cathode, high-rate, reactive, unbalanced-magnetron sputtering system. The coatings exhibited hardness values as high as 5200 kgf/mm[sup 2] for TiN/NbN, 5100 for TiN/VN, 3500 for TiN/Ni, and 3200 for TiN/NiCr. These hardness values are all twice higher than their corresponding rule-of-mixture hardness values. The structure and properties of the coatings are a strong function of superlattice period, partial pressure of N[sub 2], and energy and flux of ion bombardment during deposition. Possible mechanisms for hardness enhancement in the polycrystalline superlattice appear to be a result of dislocation blocking due to coherency strains, difference in dislocation line energies between layers, and small grain sizes. In response to high interest shown by industry, BIRL formed a 2-year Industrial Group Program, currently with 12 members, to transfer the superlattice coating technology.
- Research Organization:
- Northwestern Univ., Evanston, IL (United States)
- Sponsoring Organization:
- USDOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- FG02-90ER45434
- OSTI ID:
- 6632465
- Report Number(s):
- DOE/ER/45434-3; ON: DE93011532
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
COATINGS
NIOBIUM NITRIDES
HARDNESS
TITANIUM NITRIDES
VANADIUM NITRIDES
CHROMIUM ALLOYS
NICKEL
NICKEL ALLOYS
PROGRESS REPORT
SPUTTERING
SUPERLATTICES
ALLOYS
DOCUMENT TYPES
ELEMENTS
MECHANICAL PROPERTIES
METALS
NIOBIUM COMPOUNDS
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
VANADIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360203 - Ceramics
Cermets
& Refractories- Mechanical Properties