Microtechnology
Research reported in the thrust area of microtechnology includes: advanced plasma etch processes for high-aspect-ratio, submicron-feature-size applications; integration of PCR amplification and capillary electrophoresis in a DNA analysis device; microactuators for optical interferometry; thin silicon windows; eutectic bonding and fusion bonding; solid-source MBE-grown GaAs/AlGaAs ridge-waveguide semiconductor optical amplifiers; large area lithography; phase-shift lithography; thermally robust optical semiconductor devices using AlGaInAs grown by molecular beam epitaxy; and porous silicon formation and characterization.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 595227
- Report Number(s):
- UCRL-ID-125472; ON: DE98050271
- Resource Relation:
- Other Information: PBD: 1 Feb 1997
- Country of Publication:
- United States
- Language:
- English
Similar Records
Lattice-engineered MBE growth of high-indium mole fraction InGaAs for low cost MMICs and (1.3--1.55 {micro}m) OEICs
Microtechnology
Microtechnology for instrumentation
Conference
·
Sat Nov 01 00:00:00 EST 1997
·
OSTI ID:595227
Microtechnology
Technical Report
·
Thu Jan 01 00:00:00 EST 1998
·
OSTI ID:595227
Microtechnology for instrumentation
Conference
·
Thu Jan 01 00:00:00 EST 1998
·
OSTI ID:595227