X-ray lithography source (SXLS) vacuum system

Conference · Sun Jan 01 00:00:00 EST 1989

OSTI ID:5647414

Schuchman, J C; Aloia, J; Hsieh, H; Kim, T; Pjerov, S

In 1988 Brookhaven National Laboratory (BNL) was awarded a contract to design and construct a compact light source for x-ray lithography. This award is part of a technology transfer-to-American-industry program. The contract is for an electron storage ring designed for 690 MeV-500 ma operations. It has a racetrack configuration with a circumference to 8.5 meters. The machine is to be constructed in two phases. Phase I (200 MeV-500ma) will primarily be for low energy injection studies and will incorporate all room temperature magnets. For Phase II the two room temperature dipole magnets will be replaced with (4T) superconducting magnets and operation will be at 690 MeV. This paper describes the vacuum system for this machine. 9 refs.

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• Sponsoring Organization: DOE/ER
• DOE Contract Number: AC02-76CH00016
• OSTI ID: 5647414
• Report Number(s): BNL-43346; CONF-890335-264; ON: DE90002290; TRN: 89-031371
• Resource Relation: Conference: 13. particle accelerator conference, Chicago, IL (USA), 20-23 Mar 1989
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
VACUUM SYSTEMS
DESIGN
DEGASSING
VACUUM PUMPS
X-RAY SOURCES
EQUIPMENT
LABORATORY EQUIPMENT
PUMPS
RADIATION SOURCES
X-RAY EQUIPMENT
430303* - Particle Accelerators- Experimental Facilities & Equipment