Vacuum system design for a superconducting x-ray lithography light source
A superconducting electron storage ring for x-ray lithography (SXLS) is to be built at Brookhaven National Laboratory (BNL). The goal is to design and construct a light source specifically dedicated to x-ray lithography production and which would be used as a prototype in a technology transfer to American industry. The machine will be built in two phases: Phase I, a low energy ring (200 MeV 500ma) using all room temperature magnets which will be used primarily for low energy injection studies. Phase II will be a full energy machine (690 MeV 500ma) where the room temperature 180{degrees} dipole magnets of Phase I will be replaced with superconducting magnets. The machine, with a racetrack shape and a circumference of 8.5 meters, is designed to be portable and replaceable as a single unit. This paper will discuss the vacuum system design for both phases; i.e., gas desorption, warm bore vs cold bore, ion trapping, clearing electrodes, and diagnostic instrumentation. It would seem that a compact light source, relatively small in size for an electron storage ring, would be simple to design and build. That is not the case, however, since all the problems that arise for a larger machine must be addressed. From a vacuum standpoint, gas desorption, pumping, chamber material and design, ion trapping, diagnostics, etc. must all be considered. However, for a small machine not as many parts have to be made. 6 figs., 1 tab.
- Research Organization:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Organization:
- USDOD; DOE/ER
- DOE Contract Number:
- AC02-76CH00016
- OSTI ID:
- 5521377
- Report Number(s):
- BNL-43347; CONF-890906-5; ON: DE90002296
- Resource Relation:
- Journal Volume: 41; Journal Issue: 7-9; Conference: 11. international vacuum congress and 7th international conference on solid surfaces, Cologne (Germany, F.R.), 25-29 Sep 1989
- Country of Publication:
- United States
- Language:
- English
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