A three-dimensional reconstruction algorithm for scanning transmission electron microscopy data from thick samples
Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data and transcends the prevalent structure retrieval algorithm assumption of a very thin specimen homogenous along the optic axis. We demonstrate this approach by reconstructing the different layers of a lead iridate (Pb$$_2$$Ir$$_2$$O$$_7$$) and yttrium-stabilized zirconia (Y$$_{0.095}$$Zr$$_{0.905}$$O$$_2$$) heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- AC02-05CH11231
- OSTI ID:
- 1815397
- Country of Publication:
- United States
- Language:
- English
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