Semi-quantitative analysis of microstructures by secondary ion mass spectrometry
Conference
·
OSTI ID:15016427
The focus of this review is on trace-element quantitation of microstructures in solids. This review is aimed at the non-specialist who wants to know how SIMS quantitation is achieved. Despite 35 years of SIMS research and applications, SIMS quantitation remains a fundamentally empirical enterprise and is based on standards. The most used standards are ''bulk standards''--solids with a homogeneous distribution of a trace element--and ion-implanted solids. The SIMS systematics of bulk standards and ion-implanted solids are reviewed.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 15016427
- Report Number(s):
- UCRL-CONF-209813; TRN: US200513%%398
- Resource Relation:
- Conference: Presented at: 9th European Workshop on Modern Developments & Applications in Microbeam Analysis, Florence (IT), 05/22/2005--05/26/2005; Other Information: PBD: 14 Feb 2005
- Country of Publication:
- United States
- Language:
- English
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