Low Voltage Spatial Light Modulator
This project studied the feasibility of a Low-Voltage actuator technology that promises to reduce the switched voltage requirements and linearize the response of spatial light modulators. We created computer models that demonstrate substantial advantages offered by this technology, and fabricated and tested those devices. SLMs are electro-optic devices for modulating the phase, amplitude or angle of light beams, laser or other. Applications for arrays of SLMs include turbulence correction for high-speed optical communications, imaging through distorting media, input devices for holographic memories, optical manipulation of DNA molecules, and optical computers. Devices based on micro electro-mechanical systems (MEMS) technology have recently become of special interest because of their potential for greatly improved performance at a much lower cost than piezoelectric or liquid crystal based devices. The new MEMS-based SLM devices could have important applications in high-speed optical communication and remote optical sensing, in support of DoD and DOE missions. Virtually all previously demonstrated MEMS SLMs are based on parallel-plate capacitors where an applied voltage causes a mirror attached to a suspended electrode to move towards a fixed electrode. They require relatively high voltages, typically on the order of 100 V, resulting in (1) large transistor sizes, available only from specialized foundries at significant cost and limiting the amount/sophistication of electronics under each SLM pixel, and (2) large power dissipation/area, resulting in a heat removal issue because of the optical precision required ({approx} 1/50-th of a wavelength). The actuator described in this process uses an advanced geometry that was invented at LLNL and is currently still proprietary. The new geometry allows the application of a bias voltage. This applied bias voltage results in a reduction of the required switched voltage and a linearization of the response curve. When this advanced actuator is coupled with non-linear springs, the response curve becomes even more linear. The response curve of the springs is tailored to produce an actuator with extremely linear displacement vs. voltage characteristics.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 15005040
- Report Number(s):
- UCRL-ID-152210; TRN: US200414%%558
- Resource Relation:
- Other Information: PBD: 19 Feb 2003
- Country of Publication:
- United States
- Language:
- English
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