Tunability of indium tin oxide materials for mid-infrared plasmonics applications

Wang, Yu; Overvig, Adam C.; Shrestha, Sajan; Zhang, Ran; Wang, Ren; Yu, Nanfang; Dal Negro, Luca

doi:10.1364/OME.7.002727

Title: Tunability of indium tin oxide materials for mid-infrared plasmonics applications

Journal Article · Thu Jul 06 00:00:00 EDT 2017 · Optical Materials Express

DOI:https://doi.org/10.1364/OME.7.002727· OSTI ID:1418639

Wang, Yu ^[1]; Overvig, Adam C. ^[2]; Shrestha, Sajan ^[2]; Zhang, Ran ^[1]; Wang, Ren ^[1]; Yu, Nanfang ^[2]; Dal Negro, Luca ^[1]

Boston Univ., Boston, MA (United States)
Columbia Univ., New York, NY (United States)

Transparent conductive oxides (TCOs) have emerged as alternative plasmonic materials in recent years to replace noble metals. The advantages of TCOs include CMOS compatibility, tunability of optical and structural properties, and reduced losses. In this work, we demonstrate how post-deposition annealing of indium tin oxide (ITO) films in oxygen atmosphere allows for tuning their optical dispersion properties to the mid-infrared spectral range while simultaneously reducing their absorption losses. In particular, we show a materials strategy that extends the epsilon-near-zero (ENZ) point of ITO from the near-infrared to the mid-infrared range. This is demonstrated by fabricating periodic arrays of ITO discs of varying diameters and characterizing their plasmonic resonances in the mid-infrared range from λ = 5 to 10 µm. The developed ITO plasmonic structures pave the way to the development of novel infrared active devices for sensing and spectroscopy on a silicon-compatible platform.

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Research Organization:: Boston Univ., MA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1418639

Journal Information:: Optical Materials Express, Vol. 7, Issue 8; ISSN 2159-3930

Publisher:: Optical Society of America (OSA)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 58 works

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