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Title: Surface-texture evolution of different chemical-vapor-deposited zinc sulfide flats polished with various magnetorheological fluids

Journal Article · · Precision Engineering
 [1];  [1];  [1];  [1]
  1. Univ. of Rochester, NY (United States). Lab. for Laser Energetics

The macro-structure of chemical-vapor-deposited (CVD) zinc sulfide (ZnS) substrates is characterizedby cone-like structures that start growing at the early stages of deposition. As deposition progresses,these cones grow larger and reach centimeter size in height and millimeter size in width. It is challengingto polish out these features from the top layer, particularly for the magnetorheological finishing (MRF)process. A conventional MR fluid tends to leave submillimeter surface artifacts on the finished surface,which is a direct result of the cone-like structure. Here we describe the MRF process of polishing four CVD ZnS substrates, manufactured by four differentvendors, with conventional MR fluid at pH 10 and zirconia-coated-CI (carbonyl iron) MR fluids at pH 4, 5,and 6. We report on the surface–texture evolution of the substrates as they were MRF polished with thedifferent fluids. We show that performances of the zirconia-coated-CI MR fluid at pH 4 are significantlyhigher than that of the same fluid at pH levels of 5 and 6 and moderately higher than that of a conventionalMR fluid at pH 10. An improvement in surface–texture variability from part to part was also observedwith the pH 4 MR fluid.

Research Organization:
Laboratory for Laser Energetics, University of Rochester, Rochester, NY (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
NA0001944
OSTI ID:
1223344
Alternate ID(s):
OSTI ID: 1556186
Journal Information:
Precision Engineering, Vol. 43, Issue 2016; ISSN 0141-6359
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 8 works
Citation information provided by
Web of Science

References (5)

Minimizing artifact formation in magnetorheological finishing of chemical vapor deposition ZnS flats journal January 2005
Microstructure and Texture of Polycrystalline CVD-ZnS Analyzed via EBSD journal July 2012
Monolithic material fabrication by chemical vapour deposition journal December 1988
Zirconia-coated carbonyl-iron-particle-based magnetorheological fluid for polishing optical glasses and ceramics journal January 2009
Synthesis and corrosion study of zirconia-coated carbonyl iron particles journal February 2010

Cited By (1)

Experimental study on chemical mechanical polishing of chalcogenide glasses journal January 2019