Diffuse x-ray scattering from short-period W/C multilayers at in-plane momentum transfers 0.10-0.17 {angstrom}{sup -1}.
X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 {angstrom} and consisting of 100 W/C bilayers are reported. Specular scans revealed first-order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting to the specular data only were in the range 2.5 to 3.0 {angstrom} for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a geometry that permitted investigation of in-plane momentum transfers up to 0.17 {angstrom}{sup {minus}1}. This is roughly an order of magnitude larger than is possible in conventional rocking scans. Reasonable fitting results were obtained for an in-plane correlation function that has a Fourier transform proportional to exp(-vq{sub y}{sup 2}{vert_bar}z{sub i}-z{sub j}{vert_bar}), where z{sub i}-z{sub j} is the average separation between the i{sup th} and j{sup th} interfaces and q{sub y} is the in-plane momentum transfer.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 11768
- Report Number(s):
- ANL/XFD/CP-98830; TRN: AH200118%%184
- Resource Relation:
- Conference: Advanced Studies Institute (ASI-002) Exploration of Subsurface Phenomena by Particle Scattering, Monterey, CA (US), 10/19/1998--10/23/1998; Other Information: PBD: 20 Apr 1999
- Country of Publication:
- United States
- Language:
- English
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