Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
OSTI ID:1147804
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1147804
- Report Number(s):
- SAND2007-3340C; 523075
- Resource Relation:
- Conference: Proposed for presentation at the IEEE Frequency Control Symposium held May 28 - June 1, 2007 in Geneva, Switzerland.
- Country of Publication:
- United States
- Language:
- English
Similar Records
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers.
POST-CMOS COMPATIBLE ALUMINUM NITRIDE RING WAVE GUIDE (RWG) RESONATORS.
Conference
·
Fri Jun 01 00:00:00 EDT 2007
·
OSTI ID:1147804
+1 more
Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers.
Journal Article
·
Fri Aug 01 00:00:00 EDT 2008
· Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers
·
OSTI ID:1147804
+1 more
POST-CMOS COMPATIBLE ALUMINUM NITRIDE RING WAVE GUIDE (RWG) RESONATORS.
Conference
·
Sat Mar 01 00:00:00 EST 2008
·
OSTI ID:1147804