VHF and UHF Mechanically Coupled Aluminum Nitride MEMS Filters.
Conference
·
OSTI ID:1143378
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1143378
- Report Number(s):
- SAND2008-3306C; 517722
- Resource Relation:
- Conference: Proposed for presentation at the 2008 IEEE Frequency Control Symposium held May 19-21, 2008 in Honolulu, HI.
- Country of Publication:
- United States
- Language:
- English
Similar Records
VHF and UHF Mechanically Coupled Aluminum Nitride MEMS Filters.
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
Tue Jul 01 00:00:00 EDT 2008
·
OSTI ID:1143378
+1 more
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
Tue May 01 00:00:00 EDT 2007
·
OSTI ID:1143378
+1 more
Post CMOS Compatible Aluminum Nitride Filters MEMS Filters and Resonant Sensors.
Conference
·
Fri Jun 01 00:00:00 EDT 2007
·
OSTI ID:1143378
+1 more