Analytical scanning evanescent microwave microscope and control stage

Xiang, Xiao-Dong; Gao, Chen; Duewer, Fred; Yang, Hai Tao; Lu, Yalin

Title: Analytical scanning evanescent microwave microscope and control stage

Patent · Tue Jan 22 00:00:00 EST 2013

OSTI ID:1082722

Xiang, Xiao-Dong; Gao, Chen; Duewer, Fred; Yang, Hai Tao; Lu, Yalin

A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric, nonlinear dielectric and conductive materials. The invention also allows quantitative estimation of microwave impedance using signals obtained by the scanned evanescent microwave probe and quasistatic approximation modeling. The SEMM can be used to measure electrical properties of both dielectric and electrically conducting materials.

View Patent

Cite

Export

Save

Research Organization:: YMP (Yucca Mountain Project, Las Vegas, Nevada (United States))

Sponsoring Organization:: USDOE

DOE Contract Number:: AC03-76SF00098

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Number(s):: 8,358,141

Application Number:: 12/465,022

OSTI ID:: 1082722

Country of Publication:: United States

Language:: English

References (26)

Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis Henning, A. K.; Hochwitz, T. Materials Science and Engineering: B, Vol. 42, Issue 1-3 https://doi.org/10.1016/S0921-5107(96)01688-1	journal	December 1996
Apertureless near‐field optical microscope Zenhausern, F.; O’Boyle, M. P.; Wickramasinghe, H. K. Applied Physics Letters, Vol. 65, Issue 13 https://doi.org/10.1063/1.112931	journal	September 1994
Microwave reflection resonator sensors King, Ray https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5334941 US Patent Document 5,334,941	patent	August 1994
Dielectric probe for permittivity and permeability measurements at low microwave frequencies Derray, D.; Julien, A.; Guillon, P. 1992 IEEE Microwave Symposium Digest MTT-S https://doi.org/10.1109/MWSYM.1992.188313	conference	January 1992
Facts and artifacts in near-field optical microscopy Hecht, B.; Bielefeldt, H.; Inouye, Y. Journal of Applied Physics, Vol. 81, Issue 6 https://doi.org/10.1063/1.363956	journal	March 1997
Focusing probe for moisture measurement device Jacques, Steven L. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4364008 US Patent Document 4,364,008	patent	December 1982
Laser pumped atomic frequency standard with high frequency stability Ohtsu, Motoichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5148437 US Patent Document 5,148,437	patent	September 1992
A Quasi-Static Analysis of Open-Ended Coaxial Lines (Short Paper) Misra, D. K. IEEE Transactions on Microwave Theory and Techniques, Vol. 35, Issue 10 https://doi.org/10.1109/TMTT.1987.1133782	journal	October 1987
Apparatus for measuring physical properties of micro area Hosoki, Shigeyuki; Hasegawa, Tsuyoshi; Kohno, Makiko https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5585722 US Patent Document 5,585,722	patent	December 1996
Sub-wavelength patterning of the optical near-field Quidant, Romain; Badenes, Goncal; Cheylan, St�phanie Optics Express, Vol. 12, Issue 2 https://doi.org/10.1364/OPEX.12.000282	journal	January 2004
A microwave scanning surface harmonic microscope using a re-entrant resonant cavity Bordoni, F.; Yinghua, Li; Spataro, B. Measurement Science and Technology, Vol. 6, Issue 8 https://doi.org/10.1088/0957-0233/6/8/017	journal	August 1995
Method and apparatus for measuring the permittivity of materials Misra, Devendra K. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5233306 US Patent Document 5,233,306	patent	August 1993
Microwave Resonant Cavities for Sensing Moisture and Mass of Single Seeds and Kernels Kraszewski, A. W.; Nelson, S. O. AMPC Asia-Pacific Microwave Conference, https://doi.org/10.1109/APMC.1992.672102	conference	January 1992
Apertureless near field optical microscope Wickramasinghe, Hemantha K.; Williams, Clayton C. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/4947034 US Patent Document 4,947,034	patent	August 1990
Scanning Probe Microscopy Bottomley, Lawrence A.; Coury, Joseph E.; First, Phillip N. Analytical Chemistry, Vol. 68, Issue 12, p. 185-230 https://doi.org/10.1021/a1960008+	journal	January 1996
Method of and Apparatus for Particle Detection and Identification Chodorow, Marvin https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3774717 US Patent Document 3774717	patent	November 1973
Heterodyne electrostatic force microscopy used as a new non-contact test technique for integrated circuits Said, R.; Bridges, G. IEEE WESCANEX 95. Communications, Power, and Computing. Conference Proceedings https://doi.org/10.1109/WESCAN.1995.494078	conference	January 1995
Passive Modulating Component Zaleski, John F. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3885239 US Patent Document 3885239	patent	May 1975
Method and apparatus for measuring electrical conductivity Keller, Wolfgang https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/3953796 US Patent Document 3,953,796	patent	April 1976
Mass or weight determination of arbitrarily-shaped dielectric objects by microwave resonator measurements Kraszewski, Andrzej W.; Nelson, Stuart O. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5554935 US Patent Document 5,554,935	patent	September 1996
Use of time domain spectroscopy for measuring dielectric properties with a coaxial probe Gabriel, C.; Grant, E. H.; Young, I. R. Journal of Physics E: Scientific Instruments, Vol. 19, Issue 10 https://doi.org/10.1088/0022-3735/19/10/016	journal	October 1986
Microwave technique for single kernel, seed, nut, or fruit moisture content determination Kraszewski, Andrzej W.; Nelson, Stuart O. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5039947 US Patent Document 5,039,947	patent	August 1991
Optical probe employing an impedance matched sub-lambda transmission line Gillespie, Donald E. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5168538 US Patent Document 5,168,538	patent	December 1992
Controlling and tuning strong optical field gradients at a local probe microscope tip apex Martin, Olivier J. F.; Girard, Christian Applied Physics Letters, Vol. 70, Issue 6 https://doi.org/10.1063/1.118245	journal	February 1997
Metallized tubule-based artificial dielectric Schoen, Paul E.; Schnur, Joel M. https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5096551 US Patent Document 5,096,551	patent	March 1992
Method and apparatus for measuring surface characteristics of material Matsui, Toshiaki; Araki, Kenichi https://doi.org/https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/5379110 US Patent Document 5,379,110	patent	January 1995

Similar Records

Analytical scanning evanescent microwave microscope and control stage

Patent · Tue Jun 23 00:00:00 EDT 2009 · OSTI ID:1082722

Xiang, Xiao-Dong; Gao, Chen; Duewer, Fred; +2 more

Scanning evanescent electro-magnetic microscope

Patent · Mon Jan 01 00:00:00 EST 2001 · OSTI ID:1082722

Xiang, Xiao-Dong; Gao, Chen

Scanning evanescent electro-magnetic microscope

Patent · Wed Jan 01 00:00:00 EST 2003 · OSTI ID:1082722

Xiang, Xiao-Dong; Gao, Chen; Schultz, Peter G; +1 more

Related Subjects

47 OTHER INSTRUMENTATION

Title: Analytical scanning evanescent microwave microscope and control stage

Citation Formats

References (26)

Similar Records

Related Subjects